Abstract In this paper, torsional vibration of a micro-shaft in interacting with a micro-scale fluid media has been investigated. The presented mathematical model for this study is made up of a micro-shaft with one end fixed and a micro-cylinder at its free end which is immersed in a micro-scale fluid media. The micro-shaft can be actuated torsionally via applying an AC voltage to the capacitive plates around the micro-shaft and the outer fixed cylinder. As fluids and solids behave differently in micro scale than macro, the surrounding fluid field in the gap and also the micro-shaft have been modeled based on non-classical theories. Equation of motion governing angular displacement of the micro- shaft and also equations of motion of the fluid field have been derived based on non-local elasticity and micro-polar theories. The coupled differential equations have been transformed to an enhanced form with homogenous boundary conditions. The enhanced equations have been discretized over the beam and fluid domain using Galerkin method. Effects of non-local parameter of the micro-shaft and also micro-polar parameters of the fluid field on the response of the micro-shaft have been studied. We have shown that micropolar parameters of fluid due to having damping and inertial effects, changes resonance frequency and resonance amplitude of the shaft.

Abstract This study has been undertaken to investigate the mechanical behavior of the capacitive microphone with clamped circular diaphragm using modified couple stress theory in comparison to the classical one. Presence of the length scale parameter in modified couple stress theory provides the means to evaluate the size effect on the microphone mechanical behavior. Investigating Pull-in phenomenon and dynamic behavior of the microphone are the matters provided due to the application of a step DC voltage. Also the effects of different air damping coefficients on dynamic pull-in voltage and pull-in time have been studied. The output level or sensitivity of the microphone has been studied by investigating the frequency response in term of magnitude for different length scale parameters to figure out how the length scale parameter affects on the sensitivity of the capacitive microphone. To achieve these ends, the nonlinear differential equation of the circular diaphragm has been extracted using Kirchhoff thin plate theory. Then, a Step-by-Step Linearization Method (SSLM) has been used to escape from the nonlinearity of the differential equation. Afterwards, Galerkin-based reduced-order model has been applied to solve the obtained equation.

In this paper, squeeze film damping in a micro-beam resonator based on micro-polar theory has been investigated. The proposed model for this study consists of a clamped-clamped micro-beam bounded between two fixed layers. The gap between the micro-beam and layers is filled with air. As fluid behaves differently in micro scale than macro, the micro-scale fluid field in the gap has been modeled based on micro-polar theory. Equation of motion governing transverse deflection of the micro- beam based on modified couple stress theory and also non-linear Reynolds equation of the fluid field based on micropolar theory have been non-dimensionalized, linearized and solved simultaneously in order to calculate the quality factor of the resonator. The effect of micropolar parameters of air on the quality factor has been investigated. The quality factor of the of the micro-beam resonator for different values of non-dimensionalized length scale of the beam, squeeze number and also non-dimensionalized pressure has been calculated and compared to the obtained values of quality factor based on classical theory.

This paper presents a study on the gap dependent bifurcation behavior of an electro statically-actuated nano-beam. The sizedependent behavior of the beam was taken into account by applying the couple stress theory. Two small and large gap distance regimes have been considered in which the intermolecular vdW and Casimir forces are dominant, respectively. It has been shown that changing the gap size can affect the fundamental frequency of the beam. The bifurcation diagrams for small gap distance revealed that by changing the gap size, the number and type of the fixed points can change. However, for large gap regime, where the Casimir force is the dominant intermolecular force, changing the gap size does not affect the quality of the bifurcation behavior.